METHOD FOR FORMING LOW-IMPEDANCE HIGH-DENSITY DEPOSITED-ON-LAMINATE STRUCTURES HAVING REDUCED STRESS - Patent 1114439

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EP 1 114 439 A2

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(88)	Date of publication A3:
	18.05.2000

(43)	Date of publication:
	11.07.2001 Bulletin 2001/28

(21)	Application number: 99937726.0

(22)	Date of filing: 30.07.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US9917/434

(87)	International publication number:
	WO 0007/222 (10.02.2000 Gazette 2000/06)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

31.07.1998 US 127580
31.07.1998 US 127579
19.08.1998 US 97140 P
19.08.1998 US 97169 P
13.10.1998 US 172178
13.11.1998 US 191594
29.07.1999 US 363956

(71)	Applicant: Kulicke & Soffa Holdings, Inc.
	Willow Grove, PA 19090 (US)

(72)	Inventors:
	STRANDBERG, Jan, I. San Jose, CA 95131 (US) CHAZAN, David, J. Palo Alto, CA 94306 (US) SKINNER, Michael, P. San Jose, CA 95111 (US)

(74)	Representative: Cross, Rupert Edward Blount et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	METHOD FOR FORMING LOW-IMPEDANCE HIGH-DENSITY DEPOSITED-ON-LAMINATE STRUCTURES HAVING REDUCED STRESS