(19)

(11)

EP 1 115 806 A1

(12)

(43) Date of publication: 18.07.2001 Bulletin 2001/29 (21) Application number: 99940545.9 (22) Date of filing: 27.08.1999

(51) International Patent Classification (IPC)7: C09J 7/02, B24B 37/04, B24B 41/06, H01L 21/68 (86) International application number: PCT/JP9904/662 (87) International publication number: WO 0017/284 (30.03.2000 Gazette 2000/13)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 17.09.1998 JP 26375198 (71) Applicant: Nitta Corporation Osaka-shi,Osaka 556-0022 (JP)

(72) Inventors: TANI, NaoyukiNitta Corporation Nara Factory Nara 639-1085 (JP) KASAZAKI, ToshiakiNitta Corporation Nara Factory Nara 639-1085 (JP) KAWAHARA, ShinichiroNitta Corporation Nara Fact. Nara 639-1085 (JP) ANDO, TakashiNitta Corporation Nara Factory Nara 639-1085 (JP) YAMAMOTO, MasayoshiNitta Corporation Nara Factory Nara 639-1085 (JP) (74) Representative: Robson, Aidan John  Reddie & Grose16 Theobalds Road London WC1X 8PL London WC1X 8PL (GB)