(19)

(11)

EP 1 118 114 A1

(12)

(43) Date of publication: 25.07.2001 Bulletin 2001/30 (21) Application number: 99948405.8 (22) Date of filing: 22.09.1999

(51) International Patent Classification (IPC)7: H01L 21/68 (86) International application number: PCT/US9922/036 (87) International publication number: WO 0019/521 (06.04.2000 Gazette 2000/14)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 29.09.1998 US 163232 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: BROWN, Karl San Jose, CA 95134 (US) KHURANA, Nitin Santa Clara, CA 95051 (US) BURKHART, Vincent, E. San Jose, CA 95129 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)