......DE....FRGB................................................................JDIM360 Ver 2.4 (29 Nov 2007) - 2999001/01119032CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120080319W154deBibliographieenBibliographyfrBibliographieEP01107622.1199304202001032720031006enenen1030919219920422JP1353619219920527JP1583319219920617JP1612359219920619JP2501629219920918JP2501639219920918JP2008031920081220010725200130200712122007502007062220080319200812H01L 21/3063 20060101AFI20010830BHEP H01L 21/78 20060101ALI20010830BHEP G01P 15/12 20060101ALI20010830BHEP G01P 15/08 20060101ALI20010830BHEP G01L 9/00 20060101ALI20010830BHEP deVerfahren zum Erzeugen einer HalbleitervorrichtungenA method for producing a semiconductor devicefrMéthode pour la production d'un dispositif semi-conducteurEP-A- 0 470 003US-A- 4 706 374US-A- 5 095 34993106391.1056707519930420Fukada, Tsuyoshi1-1870, Harukishiratsuchi, Togo-choAichi-gun, Aichi-ken 470-01JPYoshino, Yoshimi, c/o Intellectual Prop. Dept.Denso Corp., 1-1, Showa-cho, Kariya-cityAichi-pref. 448-8661JPTanizawa, Yukihiko, c/oIntellectual Prop. Dept.Denso Corp., Showa-cho, Kariya-cityAichi-pref. 448-8661JPDenso Corporation00211494ND13821-1, Showa-choKariya-city, Aichi-pref. 448-8661JPWinter, Brandl, Fürniss, Hübner Röss, Kaiser, Polte Partnerschaft Patent- und Rechtsanwaltskanzlei00100051Alois-Steinecker-Strasse 2285354 FreisingDEDEFRGB20011017200142