(19)
(11) EP 1 119 647 A2

(12)

(88) Date of publication A3:
26.08.1999

(43) Date of publication:
01.08.2001 Bulletin 2001/31

(21) Application number: 98964082.6

(22) Date of filing: 18.12.1998
(51) International Patent Classification (IPC)7C22C 32/00, C23C 30/00
(86) International application number:
PCT/US9826/947
(87) International publication number:
WO 9932/677 (01.07.1999 Gazette 1999/26)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 19.12.1997 US 68319 P

(71) Applicant: LANXIDE TECHNOLOGY COMPANY, LP
Newark,DE 19714-6077 (US)

(72) Inventors:
  • HOLLINS, Michael, J.
    Newark, DE 19711 (US)
  • IRICK, Virgil, Jr.
    New Castle, DE 19720 (US)
  • AGHAJANIAN, Michael, K.
    Newark, DE 19711 (US)

(74) Representative: Andrae, Steffen, Dr. et al
Andrae Flach HaugBalanstrasse 55
81541 München
81541 München (DE)

   


(54) ALUMINUM NITRIDE SURFACED COMPONENTS