Use of a corrosion-resistant member

(19)

(11)

EP 1 120 817 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	10.10.2007 Bulletin 2007/41

(45)	Mention of the grant of the patent:
	02.05.2007 Bulletin 2007/18

(21)	Application number: 01107373.1

(22)	Date of filing: 26.03.1992

(51)

International Patent Classification (IPC):

H01L 21/00^(2006.01)
C04B 41/50^(2006.01)

C23C 16/44^(2006.01)
C23C 16/458^(2006.01)

(54)	Use of a corrosion-resistant member Verwendung eines korrosion beständigen Substratshalters Utilisation d'une porte substrat résistant à la corrosion

(84)	Designated Contracting States:
	DE FR GB

(30)

Priority:

26.03.1991 JP 8457591
28.05.1991 JP 15093291
01.10.1991 JP 25367891
09.10.1991 JP 26230091
13.02.1992 JP 5872792

(43)	Date of publication of application:
	01.08.2001 Bulletin 2001/31

(62)	Application number of the earlier application in accordance with Art. 76 EPC:
	92302608.2 / 0506391

(73)	Proprietor: NGK INSULATORS, LTD.
	Nagoya-City, Aichi Pref. 467-8530 (JP)

(72)

Inventors:

Ushikoshi, Ryusuke c/o NGK Insulators, Ltd.
Nagoya City, Aichi Pref. (JP)
Nobori, Kazuhiro
Kisogawa-cho, Haguri-Gun, Aichi Pref. (JP)
Niori, Yusuke c/0 NGK Insulators, Ltd.
Nagoya City, Aichi Pref. (JP)
Umemoto, Koichi
Toyota City, Aichi Pref. (JP)
Kobayashi, Hiromichi c/o NGK Insulators, Ltd
Nagoya City, Aichi Pref. (JP)
Honda, Toshihiko NGK Insulators, Ltd
Nagoya City, Aichi Pref. (JP)
Kawabata, Kenji c/o NGK Insulators, Ltd
Nagoya City, Aichi Pref. (JP)

(74)	Representative: Paget, Hugh Charles Edward et al
	Mewburn Ellis LLP York House 23 Kingsway London WC2B 6HP London WC2B 6HP (GB)

(56)

References cited: :

EP-A- 0 296 768

EP-A- 0 460 701

PATENT ABSTRACTS OF JAPAN vol. 012, no. 398 (C-538), 21 October 1988 (1988-10-21) & JP 63 140085 A (KYOCERA CORP), 11 June 1988 (1988-06-11)
PATENT ABSTRACTS OF JAPAN vol. 016, no. 273 (C-0953), 18 June 1992 (1992-06-18) & JP 04 066657 A (MITSUBISHI ALUM CO LTD;OTHERS: 01), 3 March 1992 (1992-03-03)
PATENT ABSTRACTS OF JAPAN vol. 009, no. 108 (C-280), 11 May 1985 (1985-05-11) & JP 59 232994 A (TOSHIBA KIKAI KK), 27 December 1984 (1984-12-27)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 106 (E-726), 14 March 1989 (1989-03-14) & JP 63 278322 A (FUJITSU LTD), 16 November 1988 (1988-11-16)

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).