(19)

(11)

EP 1 123 558 A1

(12)

(43) Date of publication: 16.08.2001 Bulletin 2001/33 (21) Application number: 00949445.1 (22) Date of filing: 02.08.2000

(51) International Patent Classification (IPC)7: H01J 1/144, H01J 1/15, H01J 1/30 (86) International application number: PCT/EP0007/518 (87) International publication number: WO 0115/192 (01.03.2001 Gazette 2001/09)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 20.08.1999 US 150047 P (71) Applicant: FEI COMPANY Hillsboro, OR 97124-5830 (US)	(72) Inventors: MCGINN, James, B. Hillsboro, OR 97124-5830 (US) DEN HARTOG, Sander, G. Hillsboro, OR 97124-5830 (US) JUN, David, S. Hillsboro, OR 97124-5830 (US) MAGERA, Gerald, G. Hillsboro, OR 97124-5830 (US) SCHWIND, Gregory, A. Hillsboro, OR 97124-5830 (US) (74) Representative: Bakker, Hendrik  INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)