SPUTTER TARGET/BACKING PLATE ASSEMBLY AND METHOD OF MAKING SAME - Patent 1125000

(19)

(11)

EP 1 125 000 A1

(12)

(43)	Date of publication:
	22.08.2001 Bulletin 2001/34

(21)	Application number: 99952963.9

(22)	Date of filing: 28.09.1999

(51)	International Patent Classification (IPC)⁷: C23C 14/34, C23C 14/35, B23K 20/14, B23K 31/02, B22F 7/08

(86)	International application number:
	PCT/US9922/369

(87)	International publication number:
	WO 0022/185 (20.04.2000 Gazette 2000/16)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV MK RO SI

(30)

Priority:

14.10.1998 US 172311

(71)	Applicant: Praxair S.T. Technology, Inc.
	North Haven, CT 06473 (US)

(72)	Inventors:
	HUNT, Thomas, J. Peekskill, NY 10566 (US) GILMAN, Paul, S. Suffern, NY 10901 (US)

(74)	Representative: Schwan - Schwan - Schorer
	PatentanwälteEuropean Patent AttorneysElfenstrasse 32 81739 München 81739 München (DE)

(54)	SPUTTER TARGET/BACKING PLATE ASSEMBLY AND METHOD OF MAKING SAME