AN IN-LINE SPUTTER DEPOSITION SYSTEM - Patent 1125001

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EP 1 125 001 A1

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(43)	Date of publication:
	22.08.2001 Bulletin 2001/34

(21)	Application number: 99951707.1

(22)	Date of filing: 01.10.1999

(51)	International Patent Classification (IPC)⁷: C23C 14/56, H01L 21/00, H01J 37/34

(86)	International application number:
	PCT/US9922/888

(87)	International publication number:
	WO 0018/980 (06.04.2000 Gazette 2000/14)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

01.10.1998 US 102610 P
21.01.1999 US 116721 P
23.09.1998 US 404516 P

(71)	Applicant: APPLIED SCIENCE & TECHNOLOGY, INC.
	Woburn,Massachusetts 01801 (US)

(72)	Inventors:
	FELSENTHAL, David Marblehead, MA 01945 (US) LEE, Chunghsin Lynnfield, MA 01940 (US) SFERLAZZO, Piero Marblehead, MA 01945 (US)

(74)	Representative: Hall, Matthew Benjamin
	Frank B. Dehn & Co.179 Queen Victoria Street London EC4V 4EL London EC4V 4EL (GB)

(54)	AN IN-LINE SPUTTER DEPOSITION SYSTEM