ATBECHDEDKESFRGBGRITLILUNLSEMCPTIE......FI....CY..*XDIM350 (Ver 2.1 Jan 2001) 1100000/0 1710000/01125001A120010822EP99951707.11999100120010430EnEnEn102610 P19981001US116721 P19990121US404516 P19980923US20010822200134200108222001347 7C 23C 14/56 A 7H 01L 21/00 B 7H 01J 37/34 BdeKATHODENZERSTÄUBUNGSYSTEM IN REIHENBAUARTenAN IN-LINE SPUTTER DEPOSITION SYSTEMfrSYSTEME DE PULVERISATION CATHODIQUE EN LIGNEAPPLIED SCIENCE & TECHNOLOGY, INC.0105474129.7529635 Cabot RoadWoburn,Massachusetts 01801USFELSENTHAL, David32 Flint StreetMarblehead, MA 01945USLEE, Chunghsin24 Bluejay RoadLynnfield, MA 01940USSFERLAZZO, Piero14 Bayview RoadMarblehead, MA 01945USHall, Matthew Benjamin00087171Frank B. Dehn & Co.179 Queen Victoria StreetLondon EC4V 4ELGBATBECHCYDEDKESFIFRGBGRIEITLILUMCNLPTSEUS992288819991001EnWO001898020000406200014