LOW TEMPERATURE FORMATION OF BACKSIDE OHMIC CONTACTS FOR VERTICAL DEVICES - Patent 1125320

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EP 1 125 320 A1

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(43)	Date of publication:
	22.08.2001 Bulletin 2001/34

(21)	Application number: 99951484.7

(22)	Date of filing: 16.09.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/04

(86)	International application number:
	PCT/US9921/475

(87)	International publication number:
	WO 0016/382 (23.03.2000 Gazette 2000/12)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

16.09.1998 US 100546 P

(71)	Applicant: CREE, INC.
	Durham, NC 27703 (US)

(72)	Inventor:
	SLATER, David, B., Jr. Raleigh, NC 27613 (US)

(74)	Representative: Bankes, Stephen Charles Digby et al
	BARON & WARREN18 South EndKensington London W8 5BU London W8 5BU (GB)

(54)	LOW TEMPERATURE FORMATION OF BACKSIDE OHMIC CONTACTS FOR VERTICAL DEVICES