(19)
(11) EP 1 127 378 A1

(12)

(43) Date of publication:
29.08.2001 Bulletin 2001/35

(21) Application number: 99948440.5

(22) Date of filing: 24.09.1999
(51) International Patent Classification (IPC)7: H01L 29/76, H01L 29/94, H01L 31/062, H01L 31/113, H01L 31/119
(86) International application number:
PCT/US9922/178
(87) International publication number:
WO 0017/936 (30.03.2000 Gazette 2000/13)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 24.09.1998 US 160778

(71) Applicants:
  • Telcordia Technologies, Inc.
    Morristown, NJ 07960-6438 (US)
  • UNIVERSITY OF MARYLAND
    College Park, Maryland 20742 (US)

(72) Inventor:
  • RAMESH, Ramamoorthy
    Silver Springs, MD 20904 (US)

(74) Representative: Beetz & PartnerPatentanwälte 
Steinsdorfstrasse 10
80538 München
80538 München (DE)

   


(54) FERROELECTRIC THIN FILMS OF REDUCED TETRAGONALITY