Fluorine-containing synthetic quartz glass and method of production

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EP 1 127 857 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	03.05.2006 Bulletin 2006/18

(45)	Mention of the grant of the patent:
	09.11.2005 Bulletin 2005/45

(21)	Application number: 01301669.6

(22)	Date of filing: 23.02.2001

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International Patent Classification (IPC):

C03C 3/06^(1968.09)
C03C 4/00^(1985.01)

C03B 19/14^(1990.01)

(54)	Fluorine-containing synthetic quartz glass and method of production Fluorhaltiges Quarzglas und Verfahren zu seiner Herstellung Verre de quartz synthétique comprenant du fluor et sa méthode de production

(84)	Designated Contracting States:
	BE DE FR GB NL SE

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Priority:

23.02.2000 JP 2000045657

(43)	Date of publication of application:
	29.08.2001 Bulletin 2001/35

(73)	Proprietor: Shin-Etsu Chemical Co., Ltd.
	Chiyoda-ku, Tokyo (JP)

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Inventors:

Maida, Shigeru, c/o Advan. Func. Mat. Res. Ctr
Kubiki-mura, Nakakubiki-gun, Niigata-ken (JP)
Yamada, Motoyuki, c/o Advan. Func. Mat. Res. Ctr
Kubiki-mura, Nakakubiki-gun, Niigata-ken (JP)
Otsuka, Hisatoshi, c/o Advan. Func. Mat. Res. Ctr
Kubiki-mura, Nakakubiki-gun, Niigata-ken (JP)
Shirota, Kazuo, c/o Advan. Func. Mat. Res. Ctr
Kubiki-mura, Nakakubiki-gun, Niigata-ken (JP)
Matsuo, Koji, c/o Advan. Func. Mat. Res. Ctr
Kubiki-mura, Nakakubiki-gun, Niigata-ken (JP)

(74)	Representative: Stoner, Gerard Patrick et al
	Mewburn Ellis LLP York House 23 Kingsway London WC2B 6HP London WC2B 6HP (GB)

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References cited: :

EP-A- 0 691 312
EP-A- 1 043 282
EP-A- 1 103 528
US-A- 5 326 729

EP-A- 1 035 084
EP-A- 1 094 040
WO-A-00/55689

PATENT ABSTRACTS OF JAPAN vol. 1996, no. 4, 30 April 1996 (1996-04-30) & JP 07 330366 A (SUMITOMO METAL IND LTD), 19 December 1995 (1995-12-19)
PATENT ABSTRACTS OF JAPAN vol. 9, no. 222, 9 September 1985 (1985-09-09) & JP 60 086039 A (SUMITOMO ELECTRIC IND CO LTD ET AL), 15 May 1985 (1985-05-15)
PATENT ABSTRACTS OF JAPAN vol. 9, no. 222, 9 September 1985 (1985-09-09) & JP 60 086044 A (SUMITOMO ELECTRIC IND CO LTD ET AL), 15 May 1985 (1985-05-15)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 8, 30 June 1998 (1998-06-30) -& JP 10 067521 A (NIKON CORP), 10 March 1998 (1998-03-10)
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 9, 30 July 1999 (1999-07-30) & JP 11 116248 A (NIKON CORP), 27 April 1999 (1999-04-27)

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).