(19)
(11) EP 1 129 364 A1

(12)

(43) Date of publication:
05.09.2001 Bulletin 2001/36

(21) Application number: 99939611.2

(22) Date of filing: 17.08.1999
(51) International Patent Classification (IPC)7G01R 31/316, G01R 1/073
(86) International application number:
PCT/IT9900/267
(87) International publication number:
WO 0011/488 (02.03.2000 Gazette 2000/09)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 19.08.1998 WO PCT/IT98/00234

(71) Applicant: Eles Semiconductor Equipment S.P.A.
06059 Todi (Perugia) (IT)

(72) Inventor:
  • ZAFFARAMI, Antonio
    Frazione Quadro,06059 Todi (IT)

(74) Representative: Simino, Massimo et al
Jacobacci & Perani S.p.A.Via Senato 8
I-20121 Milano
I-20121 Milano (IT)

   


(54) AN APPARATUS FOR PERFORMING ELECTRICAL AND ENVIRONMENTAL TESTS ON ELECTRONIC SEMICONDUCTOR DEVICES