(19)
(11) EP 1 129 390 A1

(12)

(43) Date of publication:
05.09.2001 Bulletin 2001/36

(21) Application number: 98957486.8

(22) Date of filing: 12.11.1998
(51) International Patent Classification (IPC)7G03F 7/11
(86) International application number:
PCT/US9823/243
(87) International publication number:
WO 0029/907 (25.05.2000 Gazette 2000/21)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(71) Applicant: Thompson, Andrew Michael
Ridgeway, PA 15853 (US)

(72) Inventor:
  • Thompson, Andrew Michael
    Ridgeway, PA 15853 (US)

(74) Representative: Lipscombe, Martin John et al
Keith W Nash & Co,Pearl Assurance House,90-92 Regent Street
Cambridge CB2 1DP
Cambridge CB2 1DP (GB)

   


(54) PRIMING COMPOSITION FOR BONDING PHOTORESISTS ON SUBSTRATES