(19)
(11)
EP 1 129 390 A1
(12)
(43)
Date of publication:
05.09.2001
Bulletin 2001/36
(21)
Application number:
98957486.8
(22)
Date of filing:
12.11.1998
(51)
International Patent Classification (IPC)
7
:
G03F
7/11
(86)
International application number:
PCT/US9823/243
(87)
International publication number:
WO 0029/907
(
25.05.2000
Gazette 2000/21)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(71)
Applicant:
Thompson, Andrew Michael
Ridgeway, PA 15853 (US)
(72)
Inventor:
Thompson, Andrew Michael
Ridgeway, PA 15853 (US)
(74)
Representative:
Lipscombe, Martin John et al
Keith W Nash & Co,Pearl Assurance House,90-92 Regent Street
Cambridge CB2 1DP
Cambridge CB2 1DP (GB)
(54)
PRIMING COMPOSITION FOR BONDING PHOTORESISTS ON SUBSTRATES