(19)

(11)

EP 1 133 785 A2

(12)

(88) Date of publication A3: 09.11.2000 (43) Date of publication: 19.09.2001 Bulletin 2001/38 (21) Application number: 99965863.6 (22) Date of filing: 22.11.1999

(51) International Patent Classification (IPC)7: H01J 37/28, H01J 37/30, G01N 23/225 (86) International application number: PCT/US9927/689 (87) International publication number: WO 0031/769 (02.06.2000 Gazette 2000/22)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 24.11.1998 US 199112 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95052 (US)	(72) Inventors: MANKOS, Marian San Francisco, CA 94115 (US) CHANG, T., H., P. Milpitas, CA 94404 (US) MURAY, Lawrence Moraga, CA 94556 (US) KIM, Ho-Seob Milpitas, CA 95035 (US) LEE, Kim, Y. Fremont, CA 94538 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)