(19)
(11) EP 1 133 786 A2

(12)

(88) Date of publication A3:
12.07.2001

(43) Date of publication:
19.09.2001 Bulletin 2001/38

(21) Application number: 99965053.4

(22) Date of filing: 24.11.1999
(51) International Patent Classification (IPC)7: H01L 21/00, C25D 7/12
(86) International application number:
PCT/US9928/106
(87) International publication number:
WO 0033/356 (08.06.2000 Gazette 2000/23)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 28.11.1998 US 110136 P

(71) Applicant: ACM Research, Inc.
Fremont, CA 94538 (US)

(72) Inventors:
  • WANG, Hui
    Fremont, CA 94536 (US)
  • GUTMAN, Felix
    San Jose, CA 95136 (US)
  • NUCH, Voha
    San Jose, CA 95111 (US)

(74) Representative: Vleck, Jan Montagu 
Reddie & Grose,16 Theobalds Road
London WC1X 8PL
London WC1X 8PL (GB)

   


(54) METHODS AND APPARATUS FOR HOLDING AND POSITIONING SEMICONDUCTOR WORKPIECES DURING ELECTROPOLISHING AND/OR ELECTROPLATING OF THE WORKPIECES