(19)
(11) EP 1 133 790 A1

(12)

(43) Date of publication:
19.09.2001 Bulletin 2001/38

(21) Application number: 99950907.8

(22) Date of filing: 14.10.1999
(51) International Patent Classification (IPC)7H01L 21/306
(86) International application number:
PCT/GB9903/409
(87) International publication number:
WO 0022/661 (20.04.2000 Gazette 2000/16)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 14.10.1998 GB 9822294

(71) Applicant: THE UNIVERSITY OF BIRMINGHAM
Edgbaston,Birmingham B15 2TT (GB)

(72) Inventors:
  • PALMER, Richard, Edward
    Hagley,Stourbridge DY8 2XW (GB)
  • SCHMIDT, Jens
    D-12169 Berlin (DE)
  • BARNARD, John, Cameron
    Birmingham B32 3XE (GB)
  • CHEN, Yu
    Birmingham B29 7RZ (GB)
  • SILLER, Lidija
    Birmingham B13 8RE (GB)

(74) Representative: Pearce, Anthony Richmond 
MARKS & CLERK,Alpha Tower,Suffolk Street Queensway
Birmingham B1 1TT
Birmingham B1 1TT (GB)

   


(54) CONTAMINANT REMOVAL METHOD