| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GR IE IT LI LU MC NL PT SE |
| (30) |
Priority: |
24.11.1998 GB 9825722
|
| (43) |
Date of publication of application: |
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19.09.2001 Bulletin 2001/38 |
| (73) |
Proprietor: CASECT LIMITED |
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Exhibition Road
South Kensington
London, SW7 2AZ (GB) |
|
| (72) |
Inventors: |
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- MANZ, Andreas
East Molesey,
Surrey KT8 0JT (GB)
- EIJKEL, Jan, Cornelis, Titus
London N14 4DH (GB)
- STOERI, Herbert
A-1070 Wien (AT)
|
| (74) |
Representative: Robinson, Nigel Alexander Julian |
|
D Young & Co
120 Holborn
London EC1N 2DY
London EC1N 2DY (GB) |
| (56) |
References cited: :
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- KHAN B A ET AL: "High pressure discharges in cavities formed by microfabrication techniques"
APPLIED PHYSICS LETTERS, 14 JULY 1997, AIP, USA, vol. 71, no. 2, pages 163-165, XP002131584
ISSN: 0003-6951
- SIEBERT P ET AL: "Surface microstructure/miniature mass spectrometer: processing and
applications" APPLIED PHYSICS A (MATERIALS SCIENCE PROCESSING), AUG. 1998, SPRINGER-VERLAG,
GERMANY, vol. A67, no. 2, pages 155-160, XP000878983 ISSN: 0947-8396
- KHAN B A ET AL: "Microfabricated high intensity discharge lamps" 43RD NATIONAL SYMPOSIUM
OF THE AMERICAN VACUUM SOCIETY, PHILADELPHIA, PA, USA, 14-18 OCT. 1996, vol. 15, no.
3, pt.2, pages 1220-1222, XP002131585 Journal of Vacuum Science & Technology A (Vacuum,
Surfaces, and Films), May-June 1997, AIP for American Vacuum Soc, USA ISSN: 0734-2101
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