(19)
(11) EP 1 135 667 A1

(12)

(43) Date of publication:
26.09.2001 Bulletin 2001/39

(21) Application number: 99943961.5

(22) Date of filing: 25.08.1999
(51) International Patent Classification (IPC)7G01B 9/02
(86) International application number:
PCT/US9919/601
(87) International publication number:
WO 0012/960 (09.03.2000 Gazette 2000/10)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 26.08.1998 US 97989 P

(71) Applicant: THE BOARD OF GOVERNORS FOR HIGHER EDUCATIONSTATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS
Providence, RI 02908 (US)

(72) Inventors:
  • EULER, William, B.
    Narragansett, RI 02882 (US)
  • GREGORY, Otto, J.
    Wakefield, RI 02879 (US)
  • HUSTON, Gregg, C.
    Wakefield, RI 02879 (US)

(74) Representative: Bankes, Stephen Charles Digby et al
BARON & WARREN18 South EndKensington
London W8 5BU
London W8 5BU (GB)

   


(54) THIN FILM STRAIN SENSORS BASED ON INTERFEROMETRIC OPTICAL MEASUREMENTS