| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
02.12.1998 US 204740
|
| (71) |
Applicant: FORMFACTOR, INC. |
|
Livermore, CA 94550 (US) |
|
| (72) |
Inventors: |
|
- ELDRIDGE, Benjamin, N.
Danville, CA 94523 (US)
- GRUBE, Gary, W.
Pleasanton, CA 94588 (US)
- MATHIEU, Gaetan, L.
Livermore, CA 94550 (US)
|
| (74) |
Representative: Käck, Jürgen et al |
|
Kahler, Käck, Fiener et Col.Vorderer Anger 268
86899 Landsberg
86899 Landsberg (DE) |
|
