METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES - Patent 1135792

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EP 1 135 792 A1

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(43)	Date of publication:
	26.09.2001 Bulletin 2001/39

(21)	Application number: 99949896.7

(22)	Date of filing: 28.09.1999

(51)	International Patent Classification (IPC)⁷: H01L 21/00, H01J 1/14, H01J 19/24

(86)	International application number:
	PCT/US9922/334

(87)	International publication number:
	WO 0019/494 (06.04.2000 Gazette 2000/14)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

28.09.1998 US 102159 P

(71)	Applicant: Xidex Corporation
	Austin, TX 78754 (US)

(72)	Inventor:
	MANCEVSKI, Vladimir Austin, TX 78749 (US)

(74)	Representative: Schäfer, Wolfgang, Dipl.-Ing. et al
	Dreiss, Fuhlendorf, Steimle & BeckerPostfach 10 37 62 70032 Stuttgart 70032 Stuttgart (DE)

(54)	METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES