| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
23.11.1998 US 197984
|
| (71) |
Applicants: |
|
- Infineon Technologies AG
81669 München (DE)
- ADVANCED TECHNOLOGY MATERIALS, INC.
Danbury, CT 06810 (US)
|
|
| (72) |
Inventors: |
|
- DESROCHERS, Debra, A.
Brookfield, CT 06804 (US)
- HENDRIX, Bryan, C.
Danbury, CT 06810 (US)
- ROEDER, Jeffrey, F.
Brookfield, CT 06810 (US)
- HINTERMAIER, Frank, S.
D-81547 Munich (DE)
|
| (74) |
Representative: O'Connell, David Christopher et al |
|
Haseltine Lake & Co.,Imperial House,15-19 Kingsway
London WC2B 6UD
London WC2B 6UD (GB) |
|
