(19)
(11) EP 1 135 810 A1

(12)

(43) Date of publication:
26.09.2001 Bulletin 2001/39

(21) Application number: 99957707.5

(22) Date of filing: 05.11.1999
(51) International Patent Classification (IPC)7H01L 31/18, H01L 21/312, B23K 26/18
(86) International application number:
PCT/AU9900/975
(87) International publication number:
WO 0028/604 (18.05.2000 Gazette 2000/20)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 06.11.1998 AU PP699698

(71) Applicant: Pacific Solar Pty Ltd
Botany,New South Wales, 2019 (AU)

(72) Inventors:
  • BASORE, Paul, Alan
    Carringbah, NSW 2229 (AU)
  • YOUNG, Trevor, Lindsay
    Botany, NSW 2019 (AU)
  • BARRETT, Neil
    Castle Hill, NSW 2154 (AU)

(74) Representative: Orian, Yvette Suzanne et al
Cabinet Beau de Loménie158, rue de l'Université
75340 Paris Cédex 07
75340 Paris Cédex 07 (FR)

   


(54) INDIRECT LASER PATTERNING OF RESIST