| (19) |
 |
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(11) |
EP 1 139 100 A3 |
| (12) |
EUROPEAN PATENT APPLICATION |
| (88) |
Date of publication A3: |
|
09.01.2002 Bulletin 2002/02 |
| (43) |
Date of publication A2: |
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04.10.2001 Bulletin 2001/40 |
| (22) |
Date of filing: 30.03.2001 |
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| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
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Designated Extension States: |
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AL LT LV MK RO SI |
| (30) |
Priority: |
30.03.2000 JP 2000094529 27.09.2000 JP 2000294462 27.09.2000 JP 2000294463
|
| (71) |
Applicant: EBARA CORPORATION |
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Ohta-ku, Tokyo (JP) |
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| (72) |
Inventors: |
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- Nagasawa, Hiroshi
Hirakata-shi, Osaka (JP)
- Fukunaga, Akira
Chigasaki-shi, Kanagawa-ken (JP)
- Hirose, Masayoshi
Yokohama-shi, Kanagawa-ken (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. et al |
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WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
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| |
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| (54) |
Reactive probe chip, composite substrate and method for fabrication of the same |
(57) A reaction probe chip which is prepared by loading a reactive probe on fine pieces
of carrier such as particles, tile-like plates and then arraying and immobilizing
the reactive probe-loaded carrier on a base material. The carrier fine pieces such
as particles, tile-like plates and the like are porous or have a reactive surface,
and the base material is preferably a thin inorganic plate or a thin organic plate
is disclosed.
The inorganic base material is preferably a glass slide or silicon wafer, and the
organic base material is preferably a polyester film or polyethylene film. In case
the porous carrier pieces are used, the reactivity of the inner surfaces of the porous
carrier pores should be maintained during array or immobilization process of the reactive
probe-loaded carrier.
A composite substrate characterized in that on at least a section of the surface thereof,
a plurality of porous regions are orderly arranged as compartments by non-porous regions,
or a plurality of non-porous regions are orderly arranged as compartments by porous
regions is also disclosed. The porous solid is preferably porous glass or porous ceramic,
the porous glass is preferably split-phase porous glass, and the surface is preferably
flattened by a process such as polishing.