(19)
(11) EP 1 142 003 A1

(12)

(43) Date of publication:
10.10.2001 Bulletin 2001/41

(21) Application number: 99964166.5

(22) Date of filing: 08.12.1999
(51) International Patent Classification (IPC)7H01L 21/00, B24B 37/04
(86) International application number:
PCT/US9929/078
(87) International publication number:
WO 0039/841 (06.07.2000 Gazette 2000/27)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 24.12.1998 JP 36687398

(71) Applicant: MEMC Electronic Materials, Inc.
St. Peters, Missouri 63376 (US)

(72) Inventors:
  • IKEDA, MasaakiMEMC Electronic Materials, Inc.
    St. Peters, MO 63376 (US)
  • YOSHIMURA, IchiroMEMC Electronic Materials, Inc.
    St. Peters, MO 63376 (US)

(74) Representative: Eyles, Christopher Thomas et al
W.P. THOMPSON & CO.Celcon House289-293 High Holborn
London WC1V 7HU
London WC1V 7HU (GB)

   


(54) METHOD FOR STORING CARRIER FOR POLISHING WAFER