(19)
(11) EP 1 144 709 A2

(12)

(43) Date of publication:
17.10.2001 Bulletin 2001/42

(21) Application number: 00925457.4

(22) Date of filing: 14.04.2000
(51) International Patent Classification (IPC)7C23C 14/00
(86) International application number:
PCT/GB0001/441
(87) International publication number:
WO 0063/458 (26.10.2000 Gazette 2000/43)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 15.04.1999 GB 9908476

(71) Applicant: British Nuclear Fuels PLC
Carrington,Cheshire WA3 6AS (GB)

(72) Inventors:
  • Williams, Andrew F.
    Chorlton cum Hardy,Manchester M21 9QP (GB)
  • Ward, David J.
    Osbaston,Monmouthshire MP5 3NS (GB)

(74) Representative: Regan-Addis, Heather et al
Harrison Goddard FooteOrlando House11c Compstall RoadMarple Bridge
Stockport SK6 5HH
Stockport SK6 5HH (GB)

 
Remarks:
WIPO A3 publication data is not currently available.
 


(54) METHOD AND SIMULATOR FOR SIMULATING THE DEVELOPMENT OF RESIDUAL STRESS IN IAPVD FILMS