(19)

(11)

EP 1 144 710 A3

(12)

(88) Date of publication A3: 16.08.2001 (43) Date of publication A2: 17.10.2001 Bulletin 2001/42 (21) Application number: 00975181.9 (22) Date of filing: 03.08.2000

(51) International Patent Classification (IPC)7: C23C 14/30 (86) International application number: PCT/US0021/131 (87) International publication number: WO 0111/103 (15.02.2001 Gazette 2001/07)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 04.08.1999 US 147229 P 24.07.2000 US 621754 (71) Applicant: GENERAL ELECTRIC COMPANY Schenectady, NY 12345 (US)	(72) Inventors: BRUCE, Robert, William Loveland, OH 45140 (US) EVANS, John, Douglas, Sr. Springfield, OH 45502 (US) MARICOCCHI, Antonio, Frank Loveland, OH 45140 (US) (74) Representative: Pedder, James Cuthbert  GE London Patent Operation,Essex House,12/13 Essex Street London WC2R 3AA London WC2R 3AA (GB)
	Remarks: WIPO A3 publication data is not currently available.