(19)
(11) EP 1 144 913 A1

(12)

(43) Date of publication:
17.10.2001 Bulletin 2001/42

(21) Application number: 99965064.1

(22) Date of filing: 01.12.1999
(51) International Patent Classification (IPC)7F23D 14/14
(86) International application number:
PCT/US9928/305
(87) International publication number:
WO 0036/340 (22.06.2000 Gazette 2000/25)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.12.1998 US 112767 P

(71) Applicant: CORNING INCORPORATED
Corning, N.Y. 14831 (US)

(72) Inventors:
  • DAWSON-ELLI, David, F.
    Shrewsbury, MA 01545 (US)
  • FU, Xiaodong
    Painted Post, NY 14870 (US)
  • HAWTOF, Daniel, W.
    Painted Post, NY 14870 (US)
  • KIEFER, William, J.
    Horseheads, NY 14845 (US)
  • STONE, John, III
    Painted Post, NY 14870 (US)
  • WIGHT, John, F., Jr.
    Corning, NY 14830 (US)

(74) Representative: Weise, Reinhard, Dipl.-Ing. et al
Reinhard-Skuhra-Weise & PartnerPatentanwältePostfach 44 01 51
80750 München
80750 München (DE)

   


(54) BURNER MANIFOLD APPARATUS FOR USE IN A CHEMICAL VAPOR DEPOSITION PROCESS