(19)

(11)

EP 1 145 204 A2

(12)

(43) Date of publication: 17.10.2001 Bulletin 2001/42 (21) Application number: 99936527.3 (22) Date of filing: 12.07.1999

(51) International Patent Classification (IPC)7: G08B 13/24, H01F 10/12 (86) International application number: PCT/EP9904/942 (87) International publication number: WO 0005/693 (03.02.2000 Gazette 2000/05)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 20.07.1998 EP 98202418 (71) Applicant: Innovative Sputtering Technology 9870 Zulte (BE)	(72) Inventor: TE LINTELO, Johannes B-9000 Gent (BE) (74) Representative: Messely, Marc et al N.V. Bekaert S.A.,I.P.D.-4011,Bekaertstraat 2 8550 Zwevegem 8550 Zwevegem (BE)
	Remarks: WIPO A3 publication data is not currently available.