(19)

(11)

EP 1 146 958 A1

(12)

(43) Date of publication: 24.10.2001 Bulletin 2001/43 (21) Application number: 99966320.6 (22) Date of filing: 15.12.1999

(51) International Patent Classification (IPC)7: B01J 8/02, B01J 8/04, B01J 19/30, B01D 19/02, B01D 19/04, B01D 53/14, B01D 53/34, B01D 53/40, B01D 53/68, B01D 53/70, B01D 53/78 (86) International application number: PCT/US9929/910 (87) International publication number: WO 0035/573 (22.06.2000 Gazette 2000/25)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 15.12.1998 US 212107 (71) Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. Danbury, CT 06810 (US)	(72) Inventors: ARNO, Jose, I. Brookfield, CT 06804 (US) HOLST, Mark, R. San Jose, CA 95112 (US) YEE, Sam Fremont, CA 94536 (US) SWEENEY, Joseph, D. San Francisco, CA 94112 (US) LORELLI, Jeff Fremont, CA 94536 (US) DESEVE, Jason Sunnyvale, CA 94087 (US) (74) Representative: Schüssler, Andrea, Dr. et al Kanzlei Huber & SchüsslerTruderinger Strasse 246 81825 München 81825 München (DE)