METHOD AND APPARATUS FOR ELECTRON BEAM COLUMN ASSEMBLY WITH PRECISE ALIGNMENT USING DISPLACED SEMI-TRANSPARENT MEMBRANES - Patent 1153411

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EP 1 153 411 A1

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(43)	Date of publication:
	14.11.2001 Bulletin 2001/46

(21)	Application number: 00959465.6

(22)	Date of filing: 25.08.2000

(51)	International Patent Classification (IPC)⁷: H01J 37/04, H01J 9/18

(86)	International application number:
	PCT/US0023/500

(87)	International publication number:
	WO 0135/440 (17.05.2001 Gazette 2001/20)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

10.11.1999 US 437808

(71)	Applicant: Etec Systems, Inc.
	Hayward, CA 94545 (US)

(72)	Inventors:
	SPALLAS, James, P. Dublin, CA 94568 (US) MURAY, Lawrence, P. Moraga, CA 94556 (US)

(74)	Representative: Draper, Martyn John et al
	Boult Wade TennantVerulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	METHOD AND APPARATUS FOR ELECTRON BEAM COLUMN ASSEMBLY WITH PRECISE ALIGNMENT USING DISPLACED SEMI-TRANSPARENT MEMBRANES