(19)

(11)

EP 1 153 423 A1

(12)

(43) Date of publication: 14.11.2001 Bulletin 2001/46 (21) Application number: 00903637.7 (22) Date of filing: 26.01.2000

(51) International Patent Classification (IPC)7: H01L 21/20, H01L 31/18 (86) International application number: PCT/EP0000/586 (87) International publication number: WO 0045/426 (03.08.2000 Gazette 2000/31)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE (30) Priority: 27.01.1999 EP 99200235 (71) Applicant: INTERUNIVERSITAIRE MICROELEKTRONICA CENTRUM VZW 3001 Leuven (BE)	(72) Inventors: HORZEL, Jörg B-3001 Leuven (BE) VAZSONYI, Eva H-1026 Budapest (HU) (74) Representative: Bird, Ariane  Bird Goen & Co,Vilvoordsebaan 92 3020 Winksele 3020 Winksele (BE)