(19)

(11)

EP 1 153 441 A1

(12)

(43) Date of publication: 14.11.2001 Bulletin 2001/46 (21) Application number: 00901194.1 (22) Date of filing: 25.01.2000

(51) International Patent Classification (IPC)7: H01L 31/068, H01L 27/142 (86) International application number: PCT/GB0000/178 (87) International publication number: WO 0044/052 (27.07.2000 Gazette 2000/30)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 25.01.1999 GB 9901513 (71) Applicant: Marconi Applied Technologies Limited London W1X 8AQ (GB)	(72) Inventor: TAYLOR, Stephen John IngatestoneEssex CM4 9AJ (GB) (74) Representative: Hucker, Nerys  Marconi Intellectual PropertyMarrable HouseThe VineyardsGt. Baddow ChelmsfordEssex CM2 7QS ChelmsfordEssex CM2 7QS (GB)