(19)
(11) EP 1 154 276 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
15.06.2005 Bulletin 2005/24

(45) Mention of the grant of the patent:
20.04.2005 Bulletin 2005/16

(21) Application number: 01111419.6

(22) Date of filing: 10.05.2001
(51) International Patent Classification (IPC)7: G01R 1/067, G01R 1/073

(54)

Testing head for microstructures

Testkopf für Mikrostrukturen

Tête d'essai pour microstructures

(84) Designated Contracting States:
DE FR GB

(30) Priority: 11.05.2000 IT MI001045

(43) Date of publication of application:
14.11.2001 Bulletin 2001/46

(73) Proprietor: Technoprobe S.p.A
23870 Cernusco Lombardone (Lecco) (IT)

(72) Inventors:
  • Crippa, Giuseppe
    23807 Merate (Lecco) (IT)
  • Felici, Stefano
    23807 Merate (Lecco) (IT)

(74) Representative: Botti, Mario 
Botti & Ferrari S.r.l., Via Locatelli, 5
20124 Milano
20124 Milano (IT)


(56) References cited: : 
FR-A- 2 535 064
US-A- 5 952 843
 US-A- 3 217 283
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).