METHODS OF FABRICATING ETCHED STRUCTURES - Patent 1155440

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EP 1 155 440 A1

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(43)	Date of publication:
	21.11.2001 Bulletin 2001/47

(21)	Application number: 00902762.4

(22)	Date of filing: 10.02.2000

(51)	International Patent Classification (IPC)⁷: H01L 21/027, H01L 21/308, G03F 7/00, G02B 6/12

(86)	International application number:
	PCT/GB0000/423

(87)	International publication number:
	WO 0048/236 (17.08.2000 Gazette 2000/33)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

11.02.1999 GB 9903110

(71)	Applicant: UNIVERSITY OF BRISTOL
	CliftonBristol BS8 1TH (GB)

(72)	Inventors:
	WHITE, Ian Hugh Weston,Bath BA1 3NH (GB) PENTY, Richard, Vincent Bristol BS6 6AG (GB) COWIN, Michael Canton,Cardiff CF5 1LU (GB)

(74)	Representative: Vigars, Christopher Ian
	Haseltine Lake & Co.,Imperial House,15-19 Kingsway London WC2B 6UD London WC2B 6UD (GB)

(54)	METHODS OF FABRICATING ETCHED STRUCTURES