(19)
(11) EP 1 159 658 A1

(12)

(43) Date of publication:
05.12.2001 Bulletin 2001/49

(21) Application number: 00912192.2

(22) Date of filing: 03.03.2000
(51) International Patent Classification (IPC)7: G05D 23/20
(86) International application number:
PCT/US0005/932
(87) International publication number:
WO 0052/547 (08.09.2000 Gazette 2000/36)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 03.03.1999 US 261788

(71) Applicant: FSI International, Inc.
ChaskaMinnesota 55318 (US)

(72) Inventors:
  • CHRISTENSON, Kurt
    Minnetonka, MN 55345 (US)
  • LAKE, Leo
    Eden Prairie, MN 55347 (US)
  • OLIM, Moshe
    Eden Prairie, MN 55346 (US)

(74) Representative: VOSSIUS & PARTNER 
Siebertstrasse 4
81675 München
81675 München (DE)

   


(54) METHOD AND APPARATUS FOR FLOWING LIQUID TEMPERATURE CONTROL