(19)
(11) EP 1 159 768 A1

(12)

(43) Date of publication:
05.12.2001 Bulletin 2001/49

(21) Application number: 00914695.2

(22) Date of filing: 25.02.2000
(51) International Patent Classification (IPC)7H01L 41/09
(86) International application number:
PCT/US0004/774
(87) International publication number:
WO 0051/190 (31.08.2000 Gazette 2000/35)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(30) Priority: 26.02.1999 US 261475
27.04.1999 US 300137

(71) Applicant: ACTIVE CONTROL EXPERTS INC.
Cambridge MA 02142 (US)

(72) Inventors:
  • LAZARUS, Kenneth, B.
    Concord, MA 01742 (US)
  • LUNDSTROM, Mark, E.
    Seattle, WA 98104 (US)
  • MOORE, Jeffrey, W.
    Arlington, MA 02174 (US)
  • CRAWLEY, Edward
    Cambridge, MA 02138 (US)
  • RUSSO, Farla
    Brookline, MA 02445 (US)
  • YOSHIKAWA, Shoko
    Cambridge, MA 02128 (US)
  • FITCH, Eric
    Medford, MA 02155 (US)

(74) Representative: Greenwood, John David et al
Graham Watt & Co.Riverhead
SevenoaksKent TN13 2BN
SevenoaksKent TN13 2BN (GB)

   


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