(19)
(11)
EP 1 163 446 A1
(12)
(43)
Date of publication:
19.12.2001
Bulletin 2001/51
(21)
Application number:
98965368.8
(22)
Date of filing:
06.11.1998
(51)
International Patent Classification (IPC)
7
:
F04B
45/047
(86)
International application number:
PCT/US9823/658
(87)
International publication number:
WO 0028/215
(
18.05.2000
Gazette 2000/20)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
(71)
Applicant:
HONEYWELL INC.
Minneapolis Minnesota 55408 (US)
(72)
Inventor:
CABUZ, Cleopatra
Edina, MN 55439 (US)
(74)
Representative:
Haley, Stephen et al
Gill Jennings & Every, Broadgate House, 7 Eldon Street
London EC2M 7LH
London EC2M 7LH (GB)
(54)
ELECTROSTATICALLY ACTUATED PUMPING ARRAY