(19)
(11) EP 1 163 446 A1

(12)

(43) Date of publication:
19.12.2001 Bulletin 2001/51

(21) Application number: 98965368.8

(22) Date of filing: 06.11.1998
(51) International Patent Classification (IPC)7F04B 45/047
(86) International application number:
PCT/US9823/658
(87) International publication number:
WO 0028/215 (18.05.2000 Gazette 2000/20)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

(71) Applicant: HONEYWELL INC.
Minneapolis Minnesota 55408 (US)

(72) Inventor:
  • CABUZ, Cleopatra
    Edina, MN 55439 (US)

(74) Representative: Haley, Stephen et al
Gill Jennings & Every, Broadgate House, 7 Eldon Street
London EC2M 7LH
London EC2M 7LH (GB)

   


(54) ELECTROSTATICALLY ACTUATED PUMPING ARRAY