(19)

(11)

EP 1 163 488 A1

(12)

(43) Date of publication: 19.12.2001 Bulletin 2001/51 (21) Application number: 00921435.4 (22) Date of filing: 22.03.2000

(51) International Patent Classification (IPC)7: G01B 11/06, H01L 21/66, G01N 21/88, H01L 21/304, C23C 16/52 (86) International application number: PCT/US0007/709 (87) International publication number: WO 0057/127 (28.09.2000 Gazette 2000/39)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 22.03.1999 US 125462 P 12.04.1999 US 128915 P 09.07.1999 US 143199 P 10.12.1999 US 172851 P 01.02.2000 US 495821 (71) Applicant: Sensys Instruments Corporation Santa Clara, CA 95054 (US)

(72) Inventors: STANKE, Fred, E. Cupertino, CA 95014 (US) WEBER-GRABAU, Michael Sunnyvale, CA 94087 (US) RUTH, Douglas, E. Sunnyvale, CA 94086 (US) TONG, Edric, H. Sunnyvale, CA 94086 (US) CAHILL, James, M., Jr. San Jose, CA 95120 (US) CARLISLE, Clinton Palo Alto, CA 94306 (US) BURKE, Elliot Goleta, CA 93117 (US) PHAM, Hung San Jose, CA 95132 (US) (74) Representative: Haines, Miles John  D. Young & Co. 21 New Fetter Lane London EC4A 1DA London EC4A 1DA (GB)