ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYAL*XDIM350 (Ver 2.1 Jan 2001) 1100000/0 1710000/01163488A120011219EP00921435.42000032220011004EnEnEn125462 P19990322US128915 P19990412US143199 P19990709US172851 P19991210US49582120000201US20011219200151200112192001517 7G 01B 11/06 A 7H 01L 21/66 B 7G 01N 21/88 B 7H 01L 21/304 B 7C 23C 16/52 BdeMETHODE UND VORRICHTUNG FÜR DIE MESSUNG AN WAFERNenMETHOD AND APPARATUS FOR WAFER METROLOGYfrPROCEDE ET APPAREIL DE METROLOGIE DE PLAQUETTESensys Instruments Corporation02775621PO12511EP MJH2090 Duane AvenueSanta Clara, CA 95054USSTANKE, Fred, E.22873 Longdown RoadCupertino, CA 95014USWEBER-GRABAU, Michael825 La Cross CourtSunnyvale, CA 94087USRUTH, Douglas, E.471-A Bryan AvenueSunnyvale, CA 94086USTONG, Edric, H.955 Larkspur AvenueSunnyvale, CA 94086USCAHILL, James, M., Jr.6964 Starling Valley DriveSan Jose, CA 95120USCARLISLE, Clinton562 Driscoll PlacePalo Alto, CA 94306USBURKE, Elliot7251 Alameda AvenueGoleta, CA 93117USPHAM, Hung1830 Blackmore CourtSan Jose, CA 95132USHaines, Miles John00088571D. Young & Co. 21 New Fetter LaneLondon EC4A 1DAGBATBECHCYDEDKESFIFRGBGRIEITLILUMCNLPTSEALLTLVMKROSIUS000770920000322EnWO005712720000928200039