(19)
(11) EP 1 164 207 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
24.03.2004 Bulletin 2004/13

(43) Date of publication A2:
19.12.2001 Bulletin 2001/51

(21) Application number: 00308173.4

(22) Date of filing: 19.09.2000
(51) International Patent Classification (IPC)7: C23C 18/12
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 31.05.2000 JP 2000162454

(71) Applicants:
  • JAPAN CARLIT CO., LTD.
    Chiyoda-ku Tokyo 101 (JP)
  • Rengakuji, Seichi
    Toyama-shi, Toyama (JP)

(72) Inventors:
  • Rengakuji, Seichi
    Toyama-shi, Toyama (JP)
  • Hara, Yosuke, c/o Japan Carlit Co., Ltd.
    Shibukawa-shi, Gunma (JP)
  • Kato, Takuro, c/o Japan Carlit Co., Ltd.
    Shibukawa-shi, Gunma (JP)
  • Kubota, Kazuhiro, c/o Japan Carlit Co., Ltd.
    Shibukawa-shi, Gunma (JP)
  • Shinagawa, Akihiro, c/o Japan Carlit Co., Ltd.
    Shibukawa-shi, Gunma (JP)
  • Shindo, Syuko, c/o Japan Carlit Co., Ltd.
    Shibukawa-shi, Gunma (JP)

(74) Representative: Whalley, Kevin et al
MARKS & CLERK, 57-60 Lincoln's Inn Fields
London WC2A 3LS
London WC2A 3LS (GB)

   


(54) Method for preparing metal oxide film


(57) A method for preparing a metal oxide film using a sol-gel method including the steps of: forming a solution containing a complex including a metal oxide oligomer and an organic solvent; depositing the solution on a substrate; removing at least part of the organic solvent from the solution on the substrate; and thermally treating the substrate for converting the metal oxide oligomer into the corresponding metal oxide film. In this method, since at least part of the solvent in the oligomer-solvent complex is removed before converting the metal oxide oligomer into the metal oxide film by the thermal treatment, the mutual diffusion between the substrate metal and in the metal oxide oligomer is prevented to provide a crack-free homogeneous metal oxide film on the substrate.






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