(19)
(11) EP 1 166 346 A1

(12)

(43) Date of publication:
02.01.2002 Bulletin 2002/01

(21) Application number: 00986720.1

(22) Date of filing: 22.12.2000
(51) International Patent Classification (IPC)7H01L 21/3213
(86) International application number:
PCT/US0035/131
(87) International publication number:
WO 0150/511 (12.07.2001 Gazette 2001/28)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 30.12.1999 US 475892

(71) Applicants:
  • Koninklijke Philips Electronics N.V.
    5621 BA Eindhoven (NL)

    BE CH DE DK ES FI FR GB GR IE IT LU NL PT SE TR AT CY 
  • Philips Semiconductors Inc.
    Sunnyvale, CA 94088 (US)

    MC 

(72) Inventor:
  • ZHENG, Tammy
    Fremont, CA 94539 (US)

(74) Representative: Duijvestijn, Adrianus Johannes 
Internationaal Octrooibureau B.V., Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) SEMICONDUCTOR MANUFACTURE USING HELIUM-ASSISTED ETCH