(19)

(11)

EP 1 166 347 A2

(12)

(88) Date of publication A3: 31.05.2001 (43) Date of publication: 02.01.2002 Bulletin 2002/01 (21) Application number: 00905235.8 (22) Date of filing: 24.02.2000

(51) International Patent Classification (IPC)7: H01L 21/336, H01L 29/786, H01L 29/08 (86) International application number: PCT/IB0000/235 (87) International publication number: WO 0051/165 (31.08.2000 Gazette 2000/35)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 24.02.1999 US 121473 P (71) Applicant: AUGUSTO, Carlos Jorge Ramiro Proenca 1900 Lisboa (PT)	(72) Inventor: AUGUSTO, Carlos Jorge Ramiro Proenca 1900 Lisboa (PT) (74) Representative: Viering, Jentschura & Partner  Postfach 22 14 43 80504 München 80504 München (DE)