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(11)

EP 1 169 730 A1

(12)

(43) Date of publication: 09.01.2002 Bulletin 2002/02 (21) Application number: 00917535.7 (22) Date of filing: 28.02.2000

(51) International Patent Classification (IPC)7: H01L 21/20, H01L 31/16, H03K 17/78 (86) International application number: PCT/SE0000/382 (87) International publication number: WO 0055/892 (21.09.2000 Gazette 2000/38)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 12.03.1999 SE 9900883 (71) Applicant: ABB AB 721 83 Västeras (SE)	(72) Inventors: SKYTT, Per S-724 82 Västeras (SE) JOHANSSON, Erik S-722 45 Västeras (SE) IRWIN, Mark S-724 81 Västeras (SE) (74) Representative: Olsson, Jan et al Bjerkéns Patentbyra KB P.O.Box 1274 801 37 Gävle 801 37 Gävle (SE)