METHOD FOR CMP OF LOW DIELECTRIC CONSTANT POLYMER LAYERS - Patent 1171906

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EP 1 171 906 A1

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(43)	Date of publication:
	16.01.2002 Bulletin 2002/03

(21)	Application number: 00913478.4

(22)	Date of filing: 16.02.2000

(51)	International Patent Classification (IPC)⁷: H01L 21/302

(86)	International application number:
	PCT/US0003/893

(87)	International publication number:
	WO 0049/647 (24.08.2000 Gazette 2000/34)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

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Priority:

18.02.1999 US 120567 P

(71)	Applicant: Rodel Holdings, Inc.
	Wilmington, DE 19899 (US)

(72)	Inventor:
	HOSALI, Sharath, D. Glen Mills, PA 19342 (US)

(74)	Representative: Jones, Alan John et al
	CARPMAELS & RANSFORD 43 Bloomsbury Square London, WC1A 2RA London, WC1A 2RA (GB)

(54)	METHOD FOR CMP OF LOW DIELECTRIC CONSTANT POLYMER LAYERS