(19)
(11) EP 1 171 908 A1

(12)

(43) Date of publication:
16.01.2002 Bulletin 2002/03

(21) Application number: 01906565.5

(22) Date of filing: 17.01.2001
(51) International Patent Classification (IPC)7H01L 21/3213, G03F 7/42
(86) International application number:
PCT/US0101/401
(87) International publication number:
WO 0154/184 (26.07.2001 Gazette 2001/30)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 19.01.2000 US 487757

(71) Applicants:
  • Philips Semiconductors Inc.
    Sunnyvale, CA 94088 (US)

    MC 
  • Koninklijke Philips Electronics N.V.
    5621 BA Eindhoven (NL)

    BE CH DE DK ES FI FR GB GR IE IT LU NL PT SE TR AT CY 

(72) Inventors:
  • YEH, Edward, K.
    San Jose, CA 95148 (US)
  • GABRIEL, Calvin, Todd
    Cupertino, CA 95014 (US)
  • ZHENG, Tammy
    Fremont, CA 94539 (US)
  • LEARD, Linda
    San Jose, CA 95138 (US)

(74) Representative: Duijvestijn, Adrianus Johannes 
Internationaal Octrooibureau B.V., Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) METHOD FOR REMOVING RESIDUES WITH REDUCED ETCHING OF OXIDE