(19)

(11)

EP 1 171 913 A1

(12)

(43) Date of publication: 16.01.2002 Bulletin 2002/03 (21) Application number: 01906564.8 (22) Date of filing: 17.01.2001

(51) International Patent Classification (IPC)7: H01L 21/768, H01L 23/522 (86) International application number: PCT/US0101/400 (87) International publication number: WO 0154/191 (26.07.2001 Gazette 2001/30)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 20.01.2000 US 488154 (71) Applicant: Philips Semiconductor, Inc. Sunnyvale, CA 94088-3409 (US)	(72) Inventors: YEH, Edward, K. San Jose, CA 95148 (US) WELING, Milind, G. San Jose, CA 95131 (US) (74) Representative: Duijvestijn, Adrianus Johannes  Internationaal Octrooibureau B.V., Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)