(19)

(11)

EP 1 177 478 A1

(12)

(43) Date of publication: 06.02.2002 Bulletin 2002/06 (21) Application number: 00931115.0 (22) Date of filing: 04.05.2000

(51) International Patent Classification (IPC)7: G03F 7/027 (86) International application number: PCT/EP0004/009 (87) International publication number: WO 0068/739 (16.11.2000 Gazette 2000/46)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Designated Extension States: AL LT LV MK RO SI (30) Priority: 11.05.1999 CH 89999 (71) Applicant: Ciba Specialty Chemicals Holding Inc. 4057 Basel (CH)	(72) Inventor: SETIABUDI, Frans D-79427 Eschbach (DE)