(19)
(11) EP 1 178 524 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.04.2009 Bulletin 2009/15

(45) Mention of the grant of the patent:
07.01.2009 Bulletin 2009/02

(21) Application number: 00987690.5

(22) Date of filing: 21.12.2000
(51) International Patent Classification (IPC): 
H01L 21/301(2006.01)
H01L 27/14(2006.01)
 H01L 35/32(2006.01)
(86) International application number:
PCT/JP2000/009104
(87) International publication number:
WO 2001/047004 (28.06.2001 Gazette 2001/26)

(54)

METHOD FOR FABRICATING DEVICE CHIPS FROM THIN SHEET OF PYROELECTRIC MATERIAL

METHODE ZUR ERZEUGUNG VON CHIPS AUS DÜNNEN PLÄTTCHEN PYROELEKTRISCHEN MATERIALS

PROCEDE DE FABRICATION DE PUCES DE DISPOSITIF A PARTIR D'UNE FEUILLE MINCE DE MATIERE PYROELECTRIQUE

(84) Designated Contracting States:
DE GB IT

(30) Priority: 22.12.1999 JP 36491899
28.08.2000 JP 2000256632

(43) Date of publication of application:
06.02.2002 Bulletin 2002/06

(73) Proprietor: Panasonic Electric Works Co., Ltd.
Kadoma-shi Osaka (JP)

(72) Inventors:
  • Nishimura, Makoto
    Kadoma-shi, Osaka 571-8686 (JP)
  • Kimura, Kenichi
    Kadoma-shi, Osaka 571-8686 (JP)
  • Miyagawa, Nobuyuki
    Kadoma-shi, Osaka 571-8686 (JP)
  • Kawashima, Masato
    Kadoma-shi, Osaka 571-8686 (JP)
  • Nakamura, Yoshimitsu
    Kadoma-shi, Osaka 571-8686 (JP)
  • Ikari, Motoo
    Kadoma-shi, Osaka 571-8686 (JP)
  • Takada, Yuji
    Kadoma-shi, Osaka 571-8686 (JP)
  • Taniguchi, Ryo
    Kadoma-shi, Osaka 571-8686 (JP)

(74) Representative: Strehl Schübel-Hopf & Partner 
Maximilianstrasse 54
80538 München
80538 München (DE)


(56) References cited: : 
JP-A- 7 174 621
JP-A- 55 107 273
 JP-A- 10 002 793
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).